Abstract
The single-walled carbon-nanotube (SWNT) was grown directly onto the top of the conventional Si atomic force microscopy (AFM) cantilever. This SWNT AFM cantilever was introduced into the AFM nano-oxidation process, which oxidized the titanium (Ti) metal film on the atomically flat α-Al2O3 substrate and formed the ultranarrow oxidized titanium (TiOx) line of 5 nm width. This TiOx line was used as the tunnel junction of the single-electron transistor (SET), and the SET fabricated by this process showed room-temperature Coulomb oscillation with periods of 1 V. It was determined by three-dimensional simulation that the tunnel-junction capacitance shows only weak dependence on the tunnel-junction width.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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