Abstract
An a-Si:H (hydrogenated amorphous silicon)/a-SiC:H (hydrogenated amorphous silicon carbide) staircase photodiode with linear graded-gap multiplication regions is useful for photoconversion. Noise characteristics of the a-Si:H/a-SiC:H staircase photodiode films with one and three linear graded-gap region were studied. The measured shot-noise characteristics of the photodiode film, which was operated in a photocurrent multiplication region, corresponded to the ideal value which was calculated as free-excess noise. It was found that in the graded-gap region, the a-Si:H/a-SiC:H staircase photodiode film does not generate extra noise during the photocurrent multiplication. These results indicate that the staircase photodiode films are a promising device for the high-sensitive imaging sensor.
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