Abstract
In this paper was researched the thermal processes in DC magnetron sputtering system when sputtering a titanium target, depending on parameters such as discharge power, pressure and gas flow. Physical model of sputtering processes and the part of energy balance equation were investigated and the powers of various heat fluxes that occur during the magnetron sputtering process were determined. As a parameter of energy efficiency, the value of power heat flow to the substrate is ration to the discharge power were proposed. The influence of the change in sputtering parameters on the energy efficiency of the process was investigated.
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