Abstract
The surface discharges observed at rf windows and vacuum circuit breakers (VCBs) are one of the difficulties faced when developing high-power rf windows or compact VCBs. The surface discharge is considered to take place due to the release of the surface charges. Despite the importance of the surface charging/discharging, these phenomena have not been well evaluated. In this paper, the surface charges are estimated using the multipulse method, where electron beam irradiates a sample up to the saturation condition of surface charges. The amount of surface charges on alumina and TiN coated alumina are compared and the charging mechanism is discussed.
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