Abstract

The electron spin resonance spectra Si-B3 and NL51 were detected in hydrogen-doped float-zone-grown silicon (Si) samples after electron-irradiation and annealing for the first time. Recently, the Si-B3 spectra were attributed to tetra-self-interstitial (I 4) agglomerates in positive charge-state, however an origin of the NL51 spectra was not yet established. Results obtained in this study suggest that the NL51 originate from an excitonic state of neutral I 4 agglomerate in Si. Therefore, detection of interstitial agglomerates in Si at early stages of their formation becomes possible.

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