Abstract
Hybrid integration of unconventional optical materials is arguably a promising way to substantially extend a range of chip functionalities on traditional silicon-based platforms. Especially, functional oxides are very promising because they exhibit many attractive properties, including superconductivity, piezoelectricity, ferroelectricity, and optical effects. In this article, we demonstrate hybrid photonic platform with an Erbium-doped (Er-doped) Yttria-Stabilized Zirconia (YSZ) thin film used as an active luminescent cladding on top of low-loss Silicon Nitride (SiN) waveguides. This active layer has been grown by a pulsed laser deposition (PLD) technique. Optical characterizations via photoluminescence (PL) measurements were performed in both normal and in-plane light incidence to demonstrate strong near-infrared (near-IR) emission of Er ions in the Er:YSZ thin film. Moreover, we also observed an intense in-plane guided PL emission in visible and near-IR wavelengths from hybrid Er:YSZ-on-SiNx waveguides. These results pave the way towards rare-earth-doped YSZ structures on silicon-based platforms, thereby affording required function versatility for future photonic integrated circuits.
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