Abstract
We have formed epitaxial LiNbO3 thin films of high quality on sapphire substrates (001) using an excimer-laser ablation technique and evaluated the surface acoustic wave (SAW) properties of these films. It is demonstrated that the LiNbO3 thin films on the sapphire are the candidates for a high frequency SAW filter because of their high velocities of propagation (5300–6600 m/s) and good temperature coefficients (−34 to −80 ppm/ °C).
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