Abstract
Enhanced Performance of Poly-Si Thin Film Transistors Using Fluorine Ions Implantation Chun-Hao Tu, Ting-Chang Chang,* Po-Tsun Liu, Hsiao-Wen Zan, Ya-Hsiang Tai, Che-Yu Yang, Yung-Chun Wu, Hsin-Chou Liu, Wei-Ren Chen, and Chun-Yen Chang Institute of Electronics, National Chiao Tung University, Taiwan Department of Physics and Institute of Electro-Optical Engineering, Center for Nanoscience, Nanotechnology, National Sun Yat-sen University, Kaohsiung Taiwan National Nano Device Laboratories, Taiwan
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