Abstract
Highly (100)-oriented barium stannate titanate Ba(Sn0.15Ti0.85)O3 (BTS) thin films were deposited on SrTiO3 (STO) and Nb doped SrTiO3 (NSTO) single-crystal substrates through sol-gel process, respectively. Coplanar capacitance and parallel plate capacitance structure configurations were formed by preparing interdigital electrodes (IDEs) and parallel plate electrodes (PPEs) on BTS thin film. The tunability of films with IDE was 45.54%, while the tunability of films with PPE was only 11.54% at the frequency of 1 MHz with an applied electric field of 80 kV/cm. This result showed that the tunability in the a-b plane contributes markedly to the measurements obtained with the IDE.
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