Abstract
Energy spread and extracted current measurements are presented for five different types of ion sources: hot cathode, cold cathode, magnetron, microwave, and electron cyclotron resonance (ECR). The measurements were performed with a 45° parallel-plate energy analyzer with a resolution of better than 0.5 eV at 500 eV incident energy. Energy spreads ranged from 0.5 to 4 eV, while total extracted beam currents ranged from 2 to 30 μA. Beam currents due specifically to protons, 3He++ ions, and H+2 ions are also presented. The ECR and magnetron sources gave the best overall performance. These, along with the energy analyzer, are currently being used in experiments to study ion-atom collision physics.
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