Abstract
Ti(C,N) coatings have been deposited by triode ion plating in a mixture of Ar, N 2 and C 2H 2. The energy spectra of selected ions and neutrals during deposition were measured by an energy-resolved mass spectrometer. The observed energy spectra of ions and neutrals are discussed. The energy spectra of neutral species were measured as the energy spectra of ions produced by crossed-beam electron ionization in the mass spectrometer. Both the energy spectra of Ti + ions and Ti atoms show wide energy spectra, ranging to about 40 eV, Properties of the Ti(C,N) coatings are reported, especially the stress-free lattice parameter and the residual macroscopic stress measured by X-ray diffraction. It is observed that the compressive stress varies from −6 to −21 GPa with the different deposition conditions used. Effects of the total pressure, the substrate voltage and the current in the low voltage arc on the energy spectra of ions and neutrals are discussed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
