Abstract
Devices in nano-electronics frequently consist of complex two- or three-dimensional structures with complex chemistries. A detailed characterisation thus requires not only a thorough structural characterisation, but also a highly resolved characterisation of elemental distributions. Energy filtering transmission electron microscopy is a very valuable tool for such investigations, as will be demonstrated on the basis of three different examples: a novel design of a nanoscale field effect transistor, a model design for a magnetic random access memory cell and magnetic core shell nanoparticles suitable for future nanoscale memory.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
