Abstract

Only when the tunneling gap is maintained near 10Å can the micromachined tunneling gyroscope operate regularly to generate tunneling current which is so weak that it would be submerged by the thermal-mechanical noise, 1/f tunneling noise and so on. At the meantime, the dynamic range of the device will be reduced drastically by the nonlinearity of the tunneling effect. So a controller must be designed for the miniature tunneling gyroscope to realize a 10 Å tunneling gap to decrease the nonlinearity and so as to enlarge the band-width of the device. At the other hand, the signal-to-noise ratio can be raised by the controller. Because of the anti-interference and robusticity of the LQG control theory and the time-varying characteristic of Coriolis acceleration, the preview-LQG control strategy is selected to design the closed-loop system. The simulation results suggest that the tunneling gap can be controlled near its nominal value and the measured input angular rate can be estimated accurately by the preview-LQG controller even if the input angular rate is a slowly time-varying random signal.

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