Abstract
Low-energy electron collision data for the plasma processing gas CF3I are sparse. Limited cross section data are available only for total and differential elastic electron scattering, electron-impact ionization, and electron attachment. These data are assessed, synthesized, and discussed in this paper. There is a need for confirming measurements for some of these data, and for measurements of cross sections for the other main electron–collision processes for which no data exist. There are presently no data available for the electron transport, ionization, and attachment coefficients of this molecule. © 2001 by the U.S. Secretary of Commerce on behalf of the United States. All rights reserved.
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