Abstract
This chapter presents a study of electron diffraction structure analysis and investigation of semiconducting materials. Besides being used to investigate surface structure and surface phenomena, electron-diffraction method is broadly used for determination of the atomic structure of solids and has proven to be a valuable supplement to X-ray structure analysis. Several special scattering effects of electrons by atoms and crystals make it highly effective for the solution of many special problems in physics and engineering. Electron-diffraction analysis of crystal structure reveals new perspectives. The essential advantage of the electron-diffraction method is the possibility of determining the positions of light atoms in the presence of heavy ones: hydrogen in the presence of carbon, nitrogen, oxygen, fluorine, and even silicon; nitrogen in the presence of iron, molybdenum, and so on. Structural investigation helps in making precise determinations of the nature of chemical bonding and of the concentration of components in phases of various structures and aids in the solution of a number of other questions. This chapter elaborates state of the electron-diffraction method of investigating solids at the present time. Investigation of the structure of semiconducting phases is also discussed in the chapter.
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