Abstract
The electromechanical coupled forced response of the microplate subjected to electrostatic force is investigated. Using electromechanical coupled dynamic equations and the mode superposition method, the forced responses of the microplate to voltage excitation and load excitation are analyzed, respectively. Based on this, the coupled forced responses of the micrplate to voltage and load excitations are obtained. Beat vibration caused by the coupled response is investigated and the condition that the beat vibration occurs is determined.
Highlights
MEMS are the integrated system consisting of microelectronics, microactuators, and microsensors
The electromechanical coupled forced response of the microplate subjected to electrostatic force is investigated
Assuming that the microplate subjected to electric field force has the data in Table 1, using (16) and (17), the natural frequencies and vibration modes of the microplate are obtained
Summary
MEMS are the integrated system consisting of microelectronics, microactuators, and microsensors. Examples of devices that utilize vibrations of such plates are synthetic microjets, microspeakers, and so forth [4]. Another example is micromechanical gyroscopes which are exclusively of vibrating types, including double-gimbals structure, cantilever beam structure, tuning-fork structure, and vibrating ring structure [5,6,7]. The authors presented an electromechanical coupled dynamic model of the microbeam subjected to electrostatic force [9]. The electromechanical coupled forced response of the microplate to different excitations has important effects on the operating performance of the MEMS system and should be investigated. The electromechanical coupled forced response of the microplate subjected to electrostatic force is investigated. The results are useful in designing and manufacturing of the MEMS
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