Abstract
In this article, we present an electro-enzymatic glucose sensor fabricated using a novel self-aligned and hybrid polymer fabrication process. The self-aligned fabrication process was carried out using polydimethylsiloxane (PDMS) as a process substrate material, SU-8 (a negative, epoxy based photoresist) as a sensor substrate material and gold as an electrode material. The electro-enzymatic glucose sensor was assembled from microfabricated components using a self-registration step. The sensor substrate is optically transparent and flexible. Utilizing the process, a wide range of bio-sensors for different constituents (e.g. lactate, pO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> etc.) can be fabricated. The glucose sensor was successfully fabricated using our new multilayer SU-8 process on PDMS substrate. The sensor thickness was measured between 117.15 μm and 140.15 μm. The current response of the multi-layer electroenzymatic sensor using different glucose concentrations is also measured. Besides, the current response for long term stability is also presented.
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