Abstract

Electrically calibrated cryogenic bolometers developed for radiation powers between 30 nW and 1 μW have been used for detector calibration in the soft X-ray range. These microbolometers consist of a sapphire chip with semiconductor resistor as a thermometer on the back and with an electrical heater for absolute calibration on the front. The equivalence of electrical and radiation heating has been shown by measurement of the calculable synchrotron radiation flux of the electron storage ring BESSY. In the spectral range 500 eV-4 keV results are presented for the calibration of the spectral responsivity of a Si photodiode.

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