Abstract
An equivalent-circuit model of Cu-carbon nanotube heterogeneous coaxial through-silicon vias (HCTSVs) in 3-D integrated circuits (3-D ICs) is proposed in this paper. Based on the complex effective conductivity method, the resistances and inductances of Cu-single walled carbon nanotube (SWCNT) HCTSVs and Cu-multi walled carbon nanotube (MWCNT) HCTSVs are compared with that of Cu coaxial through-silicon vias (CTSVs). Furthermore, using the proposed model, the magnitudes of their insertion losses are compared. It is shown that the transmission performance of Cu-SWCNT HCTSVs with higher metallic fraction and Cu-MWCNT HCTSVs is better than that of Cu CTSVs, and the improvement of Cu-MWCNT HCTSVs is more obvious at high frequencies. Finally, the transmission characteristics of Cu-MWCNT HCTSVs are analyzed deeply to provide helpful design guidelines for them in future high-speed 3-D ICs.
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