Abstract
Electric probes, such as the Langmuir and capacitive probes, are designed and fabricated to characterize microwave-produced plasma. In microwave- or electron cyclotron resonance (ECR)-produced plasmas, the ordinary Langmuir probe shows errors in the measurement of plasma parameters due to the presence of a steady magnetic field. To eliminate these errors and the already existing sheath effects, some modifications have to be incorporated in the design of a Langmuir probe. Two such probes, a Langmuir probe for measuring plasma parameters such as density, temperature and floating potential and a capacitive probe for detecting plasma oscillations, are designed. The plasma parameters measured by the designed probe match well with the theoretically estimated values. The design details of the two probes and the plasma parameters obtained with these probes are presented in this paper.
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