Eigen Frequency, Frequency Response, and Transient Response Analysis of MEMS T-Shape Cantilever Beam Piezoelectric Micro-Power Generator About 1 KHz

Abstract

MEMS T-shape cantilever beam Piezoelectric Micro-Power generator (PMPG) harvests mechanical vibration sources available in the surrounding ambient and converts it to electric power necessary for small sensors and small electronics devices via piezoelectric effects, Eliminating the needs for normal battery replacement specially in remote areas, inside human bodies such as artificial pacemaker and artificial cochlea .COMSOL Multiphysics 5.4 is used to simulate PMPG, Eigenfrequency is used to find the resonance frequencies for six Modes of operation and its deflection shape, resonance frequency analysis is used to find the device behavior in frequency rang cover the six mode of operation without external mechanical load, and transient analysis to study the PMPG vibration at first resonance frequency during the first 20 cycle of time. PMPG vibrate up- down in z axis inn first resonance frequency where the neutral axis located inside the proof mass , so no charge cancellation inside the functioning piezoelectric materials occur , the first resonance frequency shows also the maximum total displacement , maximum electric potential across piezoelectric material , and maximum electric energy density over the other resonance frequency mode , the PMPG work probably during transient analysis once driven by sinusoidal signal of frequency equal to first resonance frequency . The PMPG able to work probably in the range of 1300-1600 Hz where the maximum displacement, electric potential, electric energy density occur at 1334 Hz.