Abstract
Microstructured surfaces over large areas are typical in diffractive optics and biomimetic surfaces. The topography measurement is challenging due to the multi-scale nature. In this paper, an efficient stitching method is proposed for fusion of multiple subapertures to produce a large area topography. The first step is detecting edge features and then projecting them on the OXY plane. The next step is correction of lateral coordinates by registering the edge curves in overlapping regions. The change of lateral coordinates is linearly related to the lateral shifts and clocking angle which are estimated by simply solving a linear least-squares problem. In the final step, height change is also linearly related to the piston and tip-tilt of subapertures. Hence it is corrected by minimizing the height difference in overlapping regions, which is again modeled as a linear least-squares problem. The stitching method is experimentally verified on a holographic sample. Totally seven by seven subapertures are measured with an interference microscope and seamlessly stitched together.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
