Effects of preferred orientation on the piezoelectric properties of Pt/Pb(Zr0.3Ti0.7)O3/Pt thin films grown by sol–gel process

Abstract

Tetragonal lead zirconate titanate (PZT) films with different orientations and 200 nm film thicknesses were prepared on platinized silicon substrates. Types of substrate and control of thermal processes, such as layer-by-layer and one-crystallization heat treatments, result in highly (111) or (100)-oriented PZT films. The piezoelectric, dielectric, and ferroelectric properties of polycrystalline PZT films have been investigated as a function of preferred orientation. The property difference between (111) and (100)-oriented films appears to be induced by the effect of ferroelastic domain existence (90° domain in tetragonal composition). From a modified phenomenological equation, the higher electrostrictive coefficient value of 5.6 × 10−2 m4/C2 for (100)-oriented PZT may be responsible for the larger piezoelectric coefficients in (100)-oriented polycrystalline PZT films of 44 pm/V in comparison to (111)-oriented PZT films with about 3.1 × 10−2 m4/C2 of Q 33 and 40 pm/V of d 33,f . It was also observed that two (100)-oriented films prepared by different heat treatments showed different values in piezoelectric, dielectric, and ferroelectric properties even though only (100) orientation was characterized for both cases. This process-induced difference may also play an important role in determining both intrinsic and extrinsic contribution to the properties, even though these parameters seem to be more responsible for extrinsic components, such as domain wall motion.