Abstract
The NbNx>1 coatings were deposited on Si wafer and SUS 304 stainless steel substrates by a high power impulse magnetron sputtering (HiPIMS) system at various bias voltages and the ratios of nitrogen and argon (N2/Ar). By virtue of electron probe microanalysis (EPMA), X-ray diffraction pattern (XRD), scanning electron microscope (SEM), atomic force microscope (AFM) and nano indentation test, the relationships between deposition parameters and coatings properties were examined in detail. These coatings show a strong preferred orientation of (200) plane at free bias voltage. With increasing bias voltage, the intensity of (200) plane peak became weaker and the full width at half maximum of peaks ((200) and (111) peaks) became broader, implying the crystalline grain size were decreased. The (200) plane almost is disappeared at −150 V bias voltage and the phase transition maintains the same change tendency with the increase of N2/Ar gas ratio. The coating microstructure gradually evolved from coarse columnar to dense columnar, and then to compact featureless structure with increase of the bias voltage, corresponding to the decreased surface roughness. The columnar structure of coatings is unrelated to N2/Ar gas ratio and the thickness is minimum at high N2/Ar ratio, which is attributed to the poor sputtering capability of nitrogen compared with argon instead of target poisonous effect. The higher hardness (H) and elastic recovery value are obtained for NbNx>1 (H = 31.3 GPa and We = 69.2%) at −150 V bias voltage, suggesting considerable influence of bias voltage on hardness than that of the N2/Ar gas ratio.
Highlights
Transition metal nitride coatings, possessing superior performances such as high hardness, good chemical inertness, excellent thermal stability and high temperature wear resistance, have been attracting much attention of researchers and industrialists
Kim et al [6] studied the effects of deposition parameters such as N2 /Ar gas ratio, deposition temperature and substrate bias potential on the mechanical and the structural properties of niobium nitride (NbN) thin films deposited by DC magnetron sputtering
With increase of but biasalso voltage, of the incident increase theinterrupted, mobility of the condensing atoms resultthe inenergy secondary nuclei and ions columnar growth being of which the condensing atoms and result in secondary nuclei and columnar growth being interrupted, can cause the diminution of grain size and formation of nanocrystals; all these factors are which can cause the broadening. Diminution These of grain size demonstrate and formation ofthe nanocrystals; these factors are conducive to peak results that bias voltageall has a major influence conducive to peak broadening. These results demonstrate that the bias voltage has a major influence on crystal structure change, which means that the change of the NbNx>1 coating structure is caused onby crystal structure change, which means thatbias
Summary
Transition metal nitride coatings, possessing superior performances such as high hardness, good chemical inertness, excellent thermal stability and high temperature wear resistance, have been attracting much attention of researchers and industrialists. In HiPIMS deposition process, sputtering the target material with high power short duration pulses, the high level of ionized target material and gas species with high energy can be achieved It has strongly influence on the physical and structural properties of the coatings. HiPIMS technique advantageous for depositing hard coatings Both the coating structure and properties depend sensitively on deposition parameters such as bias voltage, the ratio of N2 /Ar gas, deposition temperature, sputtering power, etc. Kim et al [6] studied the effects of deposition parameters such as N2 /Ar gas ratio, deposition temperature and substrate bias potential on the mechanical and the structural properties of NbN thin films deposited by DC magnetron sputtering. The mechanical behavior of these coatings was discussed and explained based on coating microstructure
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
