Abstract

Effects of Mn flux on the magnetic properties of (Ga,Mn)N films grown on sapphire substrate by plasma-enhanced molecular beam epitaxy (PEMBE) discussed. The (Ga,Mn)N thin films were found to exhibit ferromagnetic ordering at room temperature without any secondary phases by X-ray diffraction and alternating gradient magnetometer. It is found that, although the surface morphology and the electrical properties are degraded with increasing Mn concentration, the magnetic properties of the films improve.

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