Abstract

The effects of fibre-form nanostructure of a tungsten surface on both electron emission and sputtering in helium/argon plasmas are represented. Generally, a nano-fibre forest, the so-called ‘fuzz’, made of tungsten with helium gas inside is found to have the tendency of suppressing the particle emission substantially. The electron emission comes from the impact of high-energy primary electrons. In addition, a deeply biased tungsten target, which inhibits the influx of even energetic primary electrons, seems to produce an electron emission, and it may be suppressed on the way to nanostructure formation on the surface of the W target. Such an emission process is discussed here. The sputtering yield of the He-damaged tungsten surface with the fibre-form nanostructure depends on the surface morphology while the sputtering itself changes the surface morphology, so that the time evolutions of sputtering yield from the W surface with an originally well-developed nanostructure are found to show a minimum in sputtering yield, which is about a half for the fresh nanostructured tungsten and roughly one-fifth of the yield for the original flat normal tungsten surface. The surface morphology at that time is, for the first time, made clear with field emission scanning electron microscopy observation. The physical mechanism for the appearance of such a minimum in sputtering yield is discussed.

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