Abstract
The effect of the applied voltage and magnetic field on the defining slot in focusing and energy distribution of the primary filament electron beam was studied theoretically. In this work, SIMION 8.1 software was used to determine the best operational conditions for focusing and the distribution of the electron beam in the ion source system. Furthermore, the Larmor radius on the slot was calculated in two dimensions for different values of magnetic flux density. The results showed that the values of flux density and slot voltage play an effective role in improving the dimensions of beam spot andenergy distribution in the source. The dimensions of beam spot were reduced by about 71% at voltage value of slot 75 volt and flux density 780 G. In addition; the kinetic energy distribution for electrons were computed at different magnetic flux and obtaining a homogeneous beam energy. The results of this research support the calculations of plasma source designers.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
