Abstract
We have previously shown that the combination of a UHV SEM with a field emmission gun and a CMA for Auger detection is a valuable tool for surface microanalysis /1,2 3/, and we have demonstrated 30nm resolution using conventional N'(E) detection /4/. Although Auger images can be produced in some circumstances with the resolution of the beam diameter, the size of the analysis volume is influenced by backscattered electrons, and this resolution limit has not previously been experimentally determined. In the present preliminary experiments we have observed Auger line scans across abrupt chemical boundaries as a function of incidence angle, ø, and beam energy, Ep. These intensity profiles show reasonable agreement with Monte Carlo calculations /5, 6, 7, 8/ of the spatial distribution of backscattered electrons. For near-normal incidence, most of the Auger current will be emitted from within the primary beam area.A polycrystalline tungsten surface was flashed clean by electron bombardment heating and 2-5pm diam
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