Abstract
Lead zirconate titanate (PZT) thick films were formed on several kinds of substrates by impact consolidation of PZT ultrafine particles through an aerosol deposition method. The PZT layers were shown to have a high breakdown voltage of about 700 kV/cm after annealing at temperatures from room temperature to 1000°C. After annealing at 600–1000°C for 1 h in air and poling at 250°C 40 kV/cm for 30 min, the layers had good piezoelectric properties: – d 31∼100 pm/V, which did not change with fatigue testing up to 10 9 cycles.
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