Abstract
The electron-cyclotron and transmission resonances in magnetically enhanced low-pressure one-dimensional uniform inductively coupled plasmas are studied analytically within a simple model of two driven electrodes. The results of our approach are also applicable to the case of one grounded electrode. It is shown that, for a high discharge frequency, the plasma resistance is greatly enhanced at electron-cyclotron and transmission resonances, but normally does not exhibit a sharp peak at the electron-cyclotron resonance (ECR) condition. For a low discharge frequency, the ECR heating is not effective. Conditions of strong transmission resonances are identified. A transition from a bounded to semi-infinite plasma with overlapping of transmission resonances is also considered.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
