Abstract
TiO2-V2O5 ceramic humidity sensors were prepared and measured to obtain the relationships between the added amount of V2O5 and the properties of the sensor elements, such as total pore volume, bulk impedance and the humidity-sensitive property in the low relative humidity region. It was observed that both the microstructure and the bulk impedance of the sensor element were strongly dependent on the added amount of V2O5. The equivalent circuit of the specimen was postulated for analysis and the sensor characteristics in low and high humidity regions are discussed. The samples which contained higher amounts of V2O5 seemed to be more strongly hygroscopic in low humidities, whereas the samples that had higher pore volumes contained water much more at high humidities.
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