Abstract
The tunneling magnetoresistance of Co70Fe30/AlOx/Co70Fe30 magnetic tunnel junctions with epitaxial bottom electrode annealed at different temperatures was studied. The TMR was significantly enhanced when the bottom electrodes were annealed at 300°C and above. The interface roughness, barrier width and height are almost identical within the experimental uncertainty. However, high resolution reciprocal space mapping studies showed that the lattice distortion of the epitaxial bottom electrodes from body centered cubic to body centered tetragonal had the same trend as the TMR. The tetragonal lattice distortion is attributed to be the dominant factor for this spin polarization enhancement.
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