Abstract
The effect of adventitious contamination on total-electron-yield XANES analysis of carbon species of diamond-like carbon (DLC) films was investigated. XPS and XANES measurements on a DLC sample with different amounts of contamination were carried out in the same analysis chamber. The amount of contamination was adjusted by 0.5-keV Ar-ion sputtering. The sp2-bonded atoms deduced from the XANES spectra was found to vary with amount of the surface contamination. Bombardment DLC films with 0.5-keV Ar ions might cause damage to the sp2 hybridization in DLC.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.