Abstract
This paper describes the effects of pyrolysis temperature and film thickness before annealing on the orientation and microstructure of the lead zirconate titanate (PZT) thin films prepared by chemical solution deposition method (CSD). Different thickness of the pyrolytic films were obtained by repeating deposition and pyrolysis with different times. The orientation and microstructures of the PZT thin films were characterized by X-ray diffractometry (XRD) and field-emission scanning electron microscope (SEM). The results show that the thickness of the pyrolytic films was the principal factor that affects the crystalline structures in PZT thin films.
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