Abstract
The influence of pulsed bias voltage on the structure and mechanical properties of Ti–C–N composite films prepared by pulsed bias arc ion plating was systematically investigated. The microstructure, surface morphology and bonding structure of the films were evaluated with grazing incidence X-ray diffraction, high resolution transmission electron microscopy, Raman and X-ray photoelectron spectroscopy, and scanning electron microscope. The mechanical properties such as hardness and elastic modulus were measured by nano-indentation. A composite structure consisting of nanocrystallites Ti(C,N) and amorphous carbon is observed. The surface morphology indicates that the size and amount of macroparticles at the film surface decrease with the increase of bias voltage. Applying a bias voltage of −300V in Ti–C–N films induces strong crystalline characteristic. However, other bias voltages cause a tendency to a lower degree of crystallinity and an enhanced fraction of amorphous phase. With increasing the bias voltages from −100V to −700V, the corresponding hardness and elastic modulus increase firstly and then decrease, reaching a maximum value of 32.5GPa and 367.4GP at the bias voltage of −300V.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
