Abstract
Optical and transmission electron microscopy were employed to study the effect of ruby laser irradiation on the microstructure and electromigration properties of thin aluminum films. At low energy levels a single pulse creates multiple regions of localized grain growth; grain size in the irradiated area can be an order of magnitude larger than the matrix. Vaporization, melting, and grain growth are observed and related to the input laser energy. In some cases, the morphology of the laser-damaged film resembles that of cast ingots, i.e., a columnar structure radiating from an equiaxed boundary network and bounded by a circular chill zone. The laser damage was investigated further by exploiting the structure-sensitive nature of electromigration in aluminum film. The morphology of void-hillock formation at the damaged sites provided an additional method for characterizing the mode of structural damage. The electromigration and microscopy data were then combined to propose a structural model for laser-induced damage in aluminum films.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
