Abstract
Molybdenum films with flat and smooth surfaces were prepared on Si (100) substrates using a pulsed laser deposition method. results indicate that increased laser fluence results in narrower diffraction peak, higher surface roughness, and transition from amorphous state into polycrystalline state with gradually increased grain size. The growth mechanism of the films and the effects of particle energy on the growth of the films are discussed based on an analysis of the changes in the crystallization process with laser fluence.
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