Effect of Excitation and Vibrational Temperature on the Dissociation of Nitrogen Molecules in Ar-N2 Mixture RF Discharge

Abstract

ABSTRACT Non-equilibrium argon-nitrogen mixture plasma generated at 13.56 MHz is characterized by optical emission spectroscopy and Langmuir probe techniques. The excitation and vibrational temperature are studied as a function of argon percentage in the mixture, at 30-Pa filling pressure and input RF powers of 200 and 300 watt, to find out their role in dissociation of N2 molecules. In this work, the excitation temperature is determined from Ar-I emission line intensities by using the simple Boltzmann plot method and is found to increase with argon mixing in nitrogen plasma. In similar fashion, the vibrational temperature of second positive system has been determined and is found to also have increasing trend with argon addition. The effect of excitation and vibrational temperature on the nitrogen molecular dissociation level is also monitored. It is observed that N/N 2 ratio increases with increase in excitation and vibrational temperature and falls slightly at the end.