Abstract
AlN is considered to be a promising substrate and packaging material for high power integrated circuits because of its high thermal conductivity, low dielectric constant, and thermal expansion coefficient close to that of silicon. In this paper, AlN green tape was manufactured by tape casting method. The effect of Er 2 O 3 on the phase composition, thermal conductivity, microstructure and mechanical properties of AlN ceramics has been studied. X-ray diffraction was employed to identify the phases formed during sintering. The results showed that Er 2 O 3 promoted the densification of AlN ceramics due to the formation of liquid phase Er 3 Al 5 O 12 and ErAlO 3 . As the sintering temperature increased, one of the second phases Er 3 Al 5 O 12 disappeared, reacting with Er 2 O 3 , and left the other second phase ErAlO 3 . AlN ceramics, sintered at 1820°C for 3h, presented improved thermal conductivity of 181W/(m•K) and bending strength up to 402MPa.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
