Abstract
The spinning rotor gauge (SRG) is an inert vacuum gauge with high accuracy in the range 1–10 −5 Pa. This makes the SRG suitable for vacuum measurements in sealed vacuum systems. Accuracy of the SRG below 10 −4 Pa is strongly influenced by measuring conditions. The slow-down of the magnetically suspended spinning ball below 10 −4 Pa is comparable to the changes in the rotational frequency caused by changing the radius and hence the moment of inertia due to small variations of the temperature of the ball. Measurements of pressure changes as low as 10 −6 Pa with uncertainty of some 10 −7 Pa are possible with the first generation SRG operating with the stainless steel ball, providing the temperature of the suspension head and the measuring system is stabilized to better than ±0.05 k h −1. The temperature of the spinning ball can be calculated by integrating the change in the pressure reading from its equilibrium value.
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