Abstract
A method and technique of dynamic x-ray spectrometry is presented for real-time, in situ composition determination of multi-element films during pulsed laser deposition. The method, named as Low-Angle X-ray Spectrometry (LAXS), is capable of determining the composition with an uncertainty of ±5% and requires neither theoretical calculations nor multiple calibration standards of known composition and thickness. Algorithm of LAXS is validated by comparing film composition results with Rutherford Backscattering Spectroscopy analyses. LAXS provides an immediate visual feedback on film composition and guidance for optimizations, which is critical for applications. As a material example, compositions of several Y-Ba-Cu-O films were analyzed and it is shown that LAXS can rapidly identify an optimum oxygen pressure for stoichiometric film deposition.
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