Abstract

Three-dimensional structures of microelectro-mechanical systems (MEMS)-based Ge waveguide on a Si beam were fabricated for dynamic tuning of the fundamental absorption edge of Ge by external stressing. The application of various amounts of external forces up to 1 GPa onto the Si beam shows clear red-shifts in the absorption edge of Ge waveguides on the Si beam by ~40 nm. This shift was reproduced by the deformation potential theory, considering that mode of propagation in the Ge waveguide. The wavelength tuning range obtained makes it possible to cover the whole C-band of optical communication, indicating it to be a promising approach to electro-absorption Ge modulators to get them to work with a broader wavelength range than previously reported.

Highlights

  • Si photonics is an enabler of electronic and photonic integration on a Si CMOS platform for cost-effective, bandwidth-abundant computation and communication on-chip networks

  • Ge waveguides on the Si rib waveguide with a 10 μm bending radius on the beam, and two Ge waveguides on the Si rib the Si rib waveguide on the areshown, clearly as shown, as designed

  • Ge waveguides by applying tensile stress to them and it described a prototype Ge waveguide on a Si beam structure

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Summary

Introduction

Si photonics is an enabler of electronic and photonic integration on a Si CMOS (complementary metal oxide semiconductor) platform for cost-effective, bandwidth-abundant computation and communication on-chip networks. Interferometer (MZI) modulators [1,2] reported high power consumption in the order of ~pJ/bit because of the plasma effect that takes place to achieve the refractive index change of the long waveguide arm. Another type of ERM is ring resonator modulators [3,4], which do not require high power to operate but do require thermal management to match the resonance with the modulation wavelength. Electro-absorption modulators (EAMs) are essentially free from large power consumption because of the operation under reverse bias. The range of the operation wavelength remained unchanged in these approaches

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