Abstract
In this Letter, dynamic phase-deforming interferometry (PDI) is proposed to solve the impact of environmental vibration and air turbulence on the measurement accuracy. Two interference passes, namely, the measurement pass (MP) and carrier-frequency pass (CP), are constructed, utilizing one detector to acquire the fringe patterns of the two passes simultaneously. The relative deformation phases of the CP fringe patterns are calculated with the Fourier transform method; then the phase extraction of the MP is performed via the least squares method to obtain the final phase distribution. The optical layout and phase-extraction algorithm of the PDI method are investigated, and the principle simulation and measurement experiments are performed. The experimental results show that the PDI can provide not only high-precision phase measurement under the influence of environmental vibration and air turbulence, but also has low system complexity and fast measurement speed.
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