Dynamic modelling and experimental study of asymmetric optothermal microactuator

Abstract

This paper reports the dynamic modelling and experimental study of an asymmetric optothermal microactuator (OTMA). According to the principle of thermal flux, a theoretical model for instantaneous temperature distribution of an expansion arm is established and the expression of expansion increment is derived. Dynamic expansion properties of the arm under laser pulse irradiation are theoretically analyzed indicating that both of the maximum expansion and expansion amplitude decrease with the pulse frequency increasing. Experiments have been further carried out on an OTMA fabricated by using an excimer laser micromachining system. It is shown that the OTMA deflects periodically with the same frequency of laser pulse irradiation. Experimental results also prove that both OTMA’s maximum deflection and deflection amplitude (related to maximum expansion and expansion amplitude of the arm) decrease as frequency increases, matching with the theoretical model quite well. Even though the OTMA's deflection decrease at higher frequency, it is still capable of generating 8.2μm maximum deflection and 4.2μm deflection amplitude under 17Hz/2mW laser pulse irradiation. This work improves the potential applications of optothermal microactuators in micro-opto-electro-mechanical system (MOEMS) and micro/nano-technology fields.