Dynamic force balancing for the sense mode of a silicon microgyroscope

Abstract

This paper presents a dynamic force balancing control for the sense mode of silicon microgyroscopes based on charge injection in opposite phase to balance the charge of the Coriolis force signal, nonideal coupling error and external angular disturbance, which embeds the sense mode in a closed loop system to give it a more robust performance. This control manner can widen the bandwidth and measurement range, improve the linearity and eliminate the quadrature coupling error. Theoretical calculation of the dynamic force balancing control is considered to analyze the effect of the closed loop control strategy. Experimental results using a practical silicon microgyroscope indicated a satisfactory performance of the proposed control algorithm. Comparing with the open loop, the microgyroscope achieved a scale factor of 11.7 mV (deg s−1)−1 with a nonlinearity of 0.2%, which is improved by 3.4 times, the bias stability is increased by 5.8 times and the temperature stability of the scale factor is ameliorated by 1.7 times.