Abstract
An explorative study was performed on sputter-deposited thermochromic (TC) VO2 films exposed to heat treatment under dry and humid conditions. The ambient conditions were harsh and 80-nm-thick VO2 films were rapidly converted to non-TC V2O5. It was found that a 30-nm-thick sputter-deposited Al oxide top coating provided good protection and delayed the oxidation for more than one day upon heating in dry air at 300°C and that protection occurred for several days at 95% relative humidity and 60°C. The thickness of the Al oxide was important and, expectedly, increased thickness yielded enhanced protection. Our results are important for TC fenestration as well as for other technical applications.
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