Abstract
A novel dual-axis atomic force microscope (AFM) cantilever has been fabricated with independent piezoresistive sensors for simultaneous detection of lateral and vertical forces. The cantilever consists of a flat, triangular probe connected to a base via several tall, narrow “ribs. ” The triangular probe, which is predominantly compliant in the vertical direction, is implanted with piezoresistors to form a vertical deflection sensor. The ribs, which are predominantly compliant in the lateral direction, have a separate set of sidewall-embedded piezoresistive sensors that form a lateral deflection sensor. A unique ion implant at approximately 45° to the vertical is used to produce the piezoresistive sensors and associated electrical interconnects on the cantilever structure. The device has been used to obtain vertical-force and lateral-force AFM images and to measure microscale friction.
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