Abstract
Sputtering of LaF 3 surface by singly charged rare gas ions (Ar +, He +) and Cs + ions with impact energies between 100 and 5500 eV has been performed. The emission of La +, La 2+ and F + was measured by quadrupole mass spectrometry. Whereas the energy distribution of F + resembles an E −2 dependence, the energy distributions of both singly charged and doubly charged lanthanum ions resemble E −2 distribution multiplied by the term exp ( −const. v tT ) . At the same time, no threshold of the primary projectile energy characterizing the kinetic emission model has been found. We explain the production of singly and doubly charged lanthanum ions by a partial neutralization of their + 3 lattice valency through the electron tunneling mechanism. For He + bombardment the emission of lanthanum ions gives similar qualitative results. However, the yield of F + is substantially enhanced by an interatomic Auger neutralization process between lattice F − ion and the primary projectile [1].
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