Abstract
Polarization-dependent extended x-ray absorption fine structure (PD-EXAFS) measurements have been made on a single-crystal 1000-Å-thick Co film deposited on (100) diamond. By comparing the EXAFS signals corresponding to the in-plane and out-of-plane structure relative to the film plane, we clearly determine that the film does establish the face centered cubic (fcc) phase. Distinguishing between the hcp and fcc phases can thus be performed by qualitatively noting the polarization dependence of the Fourier transform peak amplitudes corresponding to the third and fourth coordination shells. This EXAFS study shows that the Co film studied here is unambiguously in the fcc phase. The Fourier transform peaks corresponding to the first nearest neighbors, parallel and perpendicular to the film, have been compared. Results indicate less than a 0.0075 Å difference between in-plane and out-of-plane bondlengths, no significant change in coordination number and less than a 0.001 Å2 difference in EXAFS Debye–Waller factors. All of these results indicate no tetragonal distortion of the fcc Co crystal lattice. This technique should prove valuable in future studies when trying to determine the crystallinity of thin films.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.