Abstract

Vapor-liquid-solid (VLS) Si nanotowers were coated with nanocrystalline SiC to form a Si-SiC core-shell composite. Due to a mismatch in the coefficients of thermal expansion (CTE), the Si core was under a compressive stress following the deposition. The composite tower was then cross-sectioned using focused ion beam milling, exposing the Si core. Indentation into the Si showed an increased toughness as a function of diameter compared to similar sized Si nanotowers and nanospheres. This result is explained through enhanced dislocation and phase transformation plasticity in the Si core from the CTE compressive stresses.

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